发明名称 TARGET OUTPUT DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
摘要 A target output device may include: a main body for storing a target material; a nozzle unit, connected to the main body, for outputting the target material as a target; an electrode unit provided so as to face the nozzle unit; a voltage control unit that applies predetermined voltage between the electrode unit and the target material to generate electrostatic force therebetween for pulling out the target material through the nozzle unit; a pressure control unit that applies predetermined pressure to the target material; and an output control unit that causes the target to be outputted through the nozzle unit by controlling signal output timing of each of a first timing signal and a second timing signal, the first timing signal causing the voltage control unit to apply the predetermined voltage between the target material and the electrode unit at first timing, and the second timing signal causing the pressure control unit to apply the predetermined pressure to the target material at second timing.
申请公布号 US2011284774(A1) 申请公布日期 2011.11.24
申请号 US201113192857 申请日期 2011.07.28
申请人 ISHIHARA TAKANOBU;SASAKI YOUICHI;KAKIZAKI KOUJI;INOUE MASAHIRO;YABU TAKAYUKI;HOSHINO HIDEO;GIGAPHOTON INC. 发明人 ISHIHARA TAKANOBU;SASAKI YOUICHI;KAKIZAKI KOUJI;INOUE MASAHIRO;YABU TAKAYUKI;HOSHINO HIDEO
分类号 G21K5/00;H05H1/24 主分类号 G21K5/00
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