发明名称 RESIST REMOVER COMPOSITION AND METHOD FOR REMOVING RESIST USING SAME
摘要 There are provided a resist remover composition containing an amide solvent (A) represented by the following formula (1) and an organic amine compound (B), and a method for removing a resist using the resist remover composition, i.e., a resist remover composition that provides a sufficient removing capability even in a state where a resist is dissolved therein and is capable of being used for a prolonged period of time, and a method for removing a resist using the same. wherein R1 represents a linear, branched or cyclic alkyl group having from 1 to 6 carbon atoms; R2 and R3 each independently represent a linear or branched alkyl group having from 1 to 3 carbon atoms; and n represents an integer of from 0 to 2.
申请公布号 US2011287995(A1) 申请公布日期 2011.11.24
申请号 US201013147267 申请日期 2010.01.29
申请人 FUJIOKA TOYOZO;YAMASAKI HAYATO;IDEMITSU KOSAN CO., LTD. 发明人 FUJIOKA TOYOZO;YAMASAKI HAYATO
分类号 G03F7/42 主分类号 G03F7/42
代理机构 代理人
主权项
地址