A WAFER HANDLER USED TO EPI-LAYER

摘要

PURPOSE: A wafer handler used to an Epi-layer is provided to minimize the failure of a wafer due to a foreign material by removing the foreign material in a susceptor. CONSTITUTION: In a wafer handler used to an Epi-layer, a robot(110) is included in one side of a chamber(10). A handler arm(111) is combined with a robot and is rotated. A gripper(120) grips a wafer which is combined with the end of the hander arm. An image device(140) monitors a susceptor. A controller(130) controls chamber, robot, and a video apparatus.