发明名称 DONOR FILM SUPPLY SYSTEM FOR OLED MANUFACTURING
摘要 PURPOSE: A donor film supply system for manufacturing an OLED is provided to implement automatic or semi-automation system for manufacturing the OLED by supplying a donor film to a deposition chamber smoothly. CONSTITUTION: In a donor film supply system for manufacturing an OLED, a clamping unit(110) clamps a door film in a chucking tray. An inspection unit(120) inspects whether the door film has a superiority and a fault. A clamping unit(140) unclamps the door film having a fault from a chuck tray after the inspection of the inspection unit. A cleaning unit(150) is arranged between the clamping unit and the inspection unit and cleans the door film. A cleaning unit includes an ionizer and a blower to remove static electricity.
申请公布号 KR20110126969(A) 申请公布日期 2011.11.24
申请号 KR20100046546 申请日期 2010.05.18
申请人 SFA ENGINEERING CORP. 发明人 PARK, MIN HO;KIM, HYUN JU;CHO, CHAN HEE;KIM, YOUNG MIN;JEON, YONG BAE
分类号 H01L51/56 主分类号 H01L51/56
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