发明名称 |
DONOR FILM SUPPLY SYSTEM FOR OLED MANUFACTURING |
摘要 |
PURPOSE: A donor film supply system for manufacturing an OLED is provided to implement automatic or semi-automation system for manufacturing the OLED by supplying a donor film to a deposition chamber smoothly. CONSTITUTION: In a donor film supply system for manufacturing an OLED, a clamping unit(110) clamps a door film in a chucking tray. An inspection unit(120) inspects whether the door film has a superiority and a fault. A clamping unit(140) unclamps the door film having a fault from a chuck tray after the inspection of the inspection unit. A cleaning unit(150) is arranged between the clamping unit and the inspection unit and cleans the door film. A cleaning unit includes an ionizer and a blower to remove static electricity.
|
申请公布号 |
KR20110126969(A) |
申请公布日期 |
2011.11.24 |
申请号 |
KR20100046546 |
申请日期 |
2010.05.18 |
申请人 |
SFA ENGINEERING CORP. |
发明人 |
PARK, MIN HO;KIM, HYUN JU;CHO, CHAN HEE;KIM, YOUNG MIN;JEON, YONG BAE |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|