| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor having superior sensitivity in detecting accelerations in directions of X and Y axes. <P>SOLUTION: An acceleration sensor 10 comprises a support frame 11, a weight part 12 arranged so as to be displaceable to the support frame 11, a beam part 13 that has flexibility and supports the support frame 11 and the weight part 12, a gap part 14 provided on the beam part 13 in a manner to include a center line in a width direction of the beam part 13, and a distortion resistance detection part R provided on the beam part 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
