发明名称 |
METHOD AND APPARATUS FOR VERIFYING STITCHING ACCURACY OF STITCHED CHIPS ON A WAFER |
摘要 |
A method for verifying stitching accuracy of a stitched chip on a wafer is disclosed. Initially, a set of test structures are inserted within a reticle layout. An exposure program is executed to control a photolithography equipment having a stepper to perform multiple exposures of the reticle on a wafer to generate a stitched chip on the wafer. Electrical measurements are then performed on the test structures at actual stitch boundaries of the stitched chip to evaluate stitching accuracy of the stitched chip. |
申请公布号 |
US2011287367(A1) |
申请公布日期 |
2011.11.24 |
申请号 |
US201113112745 |
申请日期 |
2011.05.20 |
申请人 |
MCINTYRE THOMAS J.;ALCORN CHARLES N.;GREGORY MATTHEW A. |
发明人 |
MCINTYRE THOMAS J.;ALCORN CHARLES N.;GREGORY MATTHEW A. |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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地址 |
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