| 发明名称 |
SYNTHETIC QUARTZ GLASS SUBSTRATE AND MAKING METHOD |
| 摘要 |
A synthetic quartz glass substrate has a surface of 6 inch squares including a central surface area of 132 mm squares. The central surface area of 132 mm squares has a flatness of up to 50 nm. A frame region obtained by subtracting the central surface area of 132 mm squares from the central surface area of 148 mm squares has a flatness of up to 150 nm. |
| 申请公布号 |
US2011287219(A1) |
申请公布日期 |
2011.11.24 |
| 申请号 |
US201113113152 |
申请日期 |
2011.05.23 |
| 申请人 |
MATSUI HARUNOBU;HARADA DAIJITSU;TAKEUCHI MASAKI |
发明人 |
MATSUI HARUNOBU;HARADA DAIJITSU;TAKEUCHI MASAKI |
| 分类号 |
B32B3/00;B24B49/00;C03C3/06;G03F1/22;G03F1/24;G03F1/60;H01L21/027 |
主分类号 |
B32B3/00 |
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