发明名称 DEVICE AND METHOD FOR COATING A SUBSTRATE USING CVD
摘要 The invention relates to a device for coating a substrate (14) using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors (2) is provided in a housing (10), said heat conductors extending between a first (1) and a second electrode (8), wherein the heat conductors (2) are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (2), the invention proposes that the tensioning device comprises a tilt arm (5) having a tensioning weight (G), the heat conductor (2) being attached to the first end (E1) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).
申请公布号 US2011287192(A1) 申请公布日期 2011.11.24
申请号 US200913130728 申请日期 2009.11.13
申请人 RUEFFER MARTIN;ROSIWAL STEFAN;BAREISS CHRISTIAN;REICHERT WALTER;LEMMER OLIVER;PERLE MARC;CEMECON AG;DIACCON GMBH 发明人 RUEFFER MARTIN;ROSIWAL STEFAN;BAREISS CHRISTIAN;REICHERT WALTER;LEMMER OLIVER;PERLE MARC
分类号 C23C16/448 主分类号 C23C16/448
代理机构 代理人
主权项
地址
您可能感兴趣的专利