| 摘要 |
<p>Provided are a deposit detection device which, in any process regardless of the type and flow rate of gas used according to process, can more accurately detect a deposit (in-pump deposit) in an exhaust pump used in the process and give warning, and an exhaust pump provided with the device. A pump control apparatus (50) for an exhaust pump (P) includes a deposit detection device for detecting an in-pump deposit, and the deposit detection device has the function of executing, as initial processing, processing for reading the current value of a motor for rotationally driving a rotation body of the exhaust pump and processing for finding and storing a motor current initial value on the basis of the read motor current value, has the function of executing, as posterior processing after the initial processing, processing for reading the current value of the motor, processing for finding a motor current present value on the basis of the read motor current value, and processing for finding the amount of change of the motor current present value with respect to the motor current initial value, and detects the in-pump deposit on the basis of the amount of change.</p> |
