发明名称 |
DRIVE LOOP FOR MEMS OSCILLATOR |
摘要 |
Some embodiments regard a method comprising: generating a current according to a movement of the MEMS device; the movement is controlled by a control signal; generating a peak voltage according to the current; and adjusting the control signal when the peak voltage is out of a predetermined range. |
申请公布号 |
US2011285445(A1) |
申请公布日期 |
2011.11.24 |
申请号 |
US20100782064 |
申请日期 |
2010.05.18 |
申请人 |
HUANG MING-CHIEH;PU CHIANG;CHERN CHAN-HONG;LIN CHIH-CHANG;SWEI YUWEN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
HUANG MING-CHIEH;PU CHIANG;CHERN CHAN-HONG;LIN CHIH-CHANG;SWEI YUWEN |
分类号 |
H03L5/00;H02K33/00;H03B5/30 |
主分类号 |
H03L5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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