发明名称 SEMICONDUCTOR DEVICE
摘要 <p>Disclosed is a semiconductor device, including a plurality of MISFETs (201, 202), which are configured from a plurality of unit MISFETs that are mutually connected in arrays, said MISFETs comprising a diffusion layer (205), which is formed upon each respective semiconductor substrate and configures a source/drain thereupon, and a gate (203), which is formed upon the diffusion layer (205). The standard deviation of the misalignment of the threshold voltage between the MISFETs (201, 202) is less than the standard deviation of the misalignment of the threshold voltage between single MISFETs having an area identical to the channel area for each MISFET, which is the sum of the products of the gate lengths and gate widths of each unit MISFET therein.</p>
申请公布号 WO2011145155(A1) 申请公布日期 2011.11.24
申请号 WO2010JP06227 申请日期 2010.10.20
申请人 PANASONIC CORPORATION;IKOMA, DAISAKU;KAMEI, MASAYUKI;YAMASHITA, KYOUJI;OOTANI, KATSUHIRO 发明人 IKOMA, DAISAKU;KAMEI, MASAYUKI;YAMASHITA, KYOUJI;OOTANI, KATSUHIRO
分类号 H01L21/82;H01L21/8234;H01L27/088;H01L29/78 主分类号 H01L21/82
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