| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize an antireflection optical element which has a sufficient manufacturing yield. <P>SOLUTION: An antireflection optical element has a one-dimensional fine periodic structure in which a thick trapezoidal shape with outwardly extended oblique sides of a basic shape, which satisfies a condition: D=P, 0<d≥D/2, 3≥X≥15, H≤0.6λ2 where a pitch is P, lengths are d and D, an aspect ratio is X(=H/P), is one-dimensionally arrayed as a cross-sectional shape at an array pitch P. An area of the thick trapezoidal shape S satisfies 1.25s≤S>s with respect to an area of the basic trapezoidal shape s. <P>COPYRIGHT: (C)2012,JPO&INPIT |
