| 摘要 |
An improved manufacturing process for resonator-based pressure transducers is described. The process is a batch process in which several resonators are shaped simultaneously, using an etching process such as plasma etching. The end pieces are also shaped, if required, for several transducers. The end pieces and resonators are sandwiched together prior to separating the individual transducer units. The individual transducer units are then separated using a cutting process. The described process can be used to manufacture pressure transducers having a substantially smaller size, for example 5-6 mm outer dimensions and 2-3mm resonators. The outer shape of the transducers can be a non-circular cylindrical shape such as that of a right square prism or an octagonal prism. |
