| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a non-contact conveying device accurately maintaining a floating height of an article including even a large FPD (Flat Panel Display) so as to be suitable for process use. <P>SOLUTION: The non-contact conveying device 12a is provided with a fluid jet nozzle, and provided on a conveying surface of a base body 4 with a plurality of swirl-flow forming bodies 2, 3 generating an upward swirl flow on the surface side toward separating direction from the surface by jetting a fluid from the fluid jet nozzle. The non-contact conveying device 12a is provided on the conveying surface of the base body 4 with a plurality of suction holes 5 for sucking the fluid. The suction holes 5 and the swirl-flow forming bodies 2, 3 are alternately arranged along the width direction X and the longitudinal direction Y of the base body 4. The base body 4 is equipped with a supply groove 8b with a rhombic grid shape in planar view communicating to the plurality of the swirl-flow forming bodies 2, 3, and a suction groove 8f with a rhombic grid shape in planar view communicating to the plurality of the suction holes 5. The supply groove 8b and the suction groove 8f are arranged at different heights from each other and alternately in planar view. <P>COPYRIGHT: (C)2012,JPO&INPIT |
