| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid jet head that prevents a leak current, along with a liquid jet apparatus using the same, and to provide a method for manufacturing a piezoelectric element. <P>SOLUTION: The manufacturing method is configured to manufacture the liquid jet head provided with a piezoelectric layer 70 sandwiched between a first electrode 60 and a second electrode 80, and having a piezoelectric element in a pressure generating chamber, for causing pressure variation therein. The method includes: a first electrode forming step of forming the first electrode, which also includes a step for forming by a vapor deposition technique, a diffusion preventing layer 62 containing at least either of platinum or iridium; a piezoelectric layer forming step of forming on the first electrode, a piezoelectric layer consisting of a composite oxide containing sodium niobate potassium; and a second electrode forming step of forming the second electrode on the piezoelectric layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
