| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer adhesive sheet in which a peeling base material is peeled from a film-like adhesive without peeling between a self-adhesive film and the film-like adhesive, and which sufficiently holds a wafer ring. <P>SOLUTION: The multilayer adhesive sheet includes a peeling base material (1), a punched film-like adhesive (2) which is arranged on the surface of the peeling base material (1), and a self-adhesive film (3) arranged so as to cover the film-like adhesive (2). Further, a peeling assisting film (4) having a self-adhesive layer on both surfaces is arranged in a region including the whole or a portion of the periphery of the film-like adhesive (2) between the peeling base material (1) and each of the film-like adhesive (2) and the adhesive film (3), and the adhesive force (Fa) between the peeling assisting film (4) and each of the film-like adhesive (2) and the self-adhesive film (3) is larger than the adhesive force (Fb) between the peeling base material (1) and the peeling assisting film (4). <P>COPYRIGHT: (C)2012,JPO&INPIT |
