| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a supporting tray in which a plurality of workpieces are machined all at once without damaging outer circumferences of the workpieces. <P>SOLUTION: The supporting tray is provided for supporting the workpieces. The tray includes a plurality of circular concave portions formed at the upper surface of a supporting substrate and separated from one another. <P>COPYRIGHT: (C)2012,JPO&INPIT |
