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发明名称
摘要
申请公布号
JP4819691(B2)
申请公布日期
2011.11.24
申请号
JP20060540151
申请日期
2004.10.26
申请人
发明人
分类号
H01S5/183;H01L23/62;H01L27/15;H01L33/00;H01L33/14;H01S5/026;H01S5/042;H01S5/068;H01S5/32;H01S5/40
主分类号
H01S5/183
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代理人
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