VACUUM PROCESSING APPARATUS, METHOD FOR PROCESSING OBJECT TO BE PROCESSED, AND FILM FORMING APPARATUS

摘要

Disclosed are: a vacuum processing apparatus which comprises a sealing structure wherein a sealing member, which is formed from a resin, is prevented from being irradiated with light; a method for processing an object to be processed, wherein the vacuum processing apparatus is used; and a film forming apparatus which comprises the vacuum processing apparatus. Specifically disclosed is a vacuum processing apparatus which comprises: a vacuum processing chamber (41); a stage (43); a light-transmitting partition wall (44) that is affixed to the upper surface of the side wall that forms an upper opening portion of the vacuum processing chamber; a light irradiation device (45) that is arranged outside the vacuum processing chamber; a sealing member (46) that is formed from a resin and provided between the lower peripheral portion of the light-transmitting partition wall and the upper surface of the side wall of the vacuum processing chamber, to said upper surface the light-transmitting partition wall being affixed; and a light energy blocking member (47) that is provided between the sealing member and the light-transmitting partition wall or on the surface of the sealing member.