发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 Oxygen is released from the insulating layer, whereby oxygen deficiency in the oxide semiconductor layer and an interface state between the insulating layer and the oxide semiconductor layer can be reduced. Accordingly, a semiconductor device where reliability is high and variation in electric characteristics is small can be manufactured.
申请公布号 WO2011145632(A1) 申请公布日期 2011.11.24
申请号 WO2011JP61350 申请日期 2011.05.11
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;ENDO, YUTA;SASAKI, TOSHINARI;NODA, KOSEI;SATO, MIZUHO 发明人 ENDO, YUTA;SASAKI, TOSHINARI;NODA, KOSEI;SATO, MIZUHO
分类号 H01L29/786;G02F1/1368;G09F9/00;G09F9/30;H01L21/336;H01L51/50;H05B33/22 主分类号 H01L29/786
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