| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic probe device using an emitter array in which the probe current can be increased while keeping the diameter of a probe. <P>SOLUTION: The electronic probe device comprises: an FE emitter array 1 arranged in the shape of a ring; a lens 2 which focuses a beam of the FE emitter array 1 to a diffraction surface; an iris 3 arranged on the diffraction surface; and an optical system 5 which irradiates a sample 6 with the reduced image of the diaphragm face of the iris 3. The electronic probe device is configured to increase a probe current while keeping the probe diameter of the device. <P>COPYRIGHT: (C)2012,JPO&INPIT |
