| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a thermoelectric conversion module composed of multiple thermoelectric conversion elements by collectively forming a number of thermoelectric conversion material chips on a substrate by electrolytic deposition. <P>SOLUTION: Electrodes 12 each penetrating an insulation substrate 10 in its thickness direction are arranged on the insulation substrate 10. Portions of the electrodes are masked except positions at which chips are to be formed. A mold plate 18 having through-holes 20, the insulation substrate and a conductive plate 14 are firmly fixed at each position where the chip is to be formed and the electrodes are electrically connected. In an electrolyte, electrolytic deposition is performed via the conductive plate with each electrode used as a cathode electrode so that the through-holes are filled with thermoelectric conversion materials to thereby form the chips. A step for removing the mold plate, the mask and the conductive plate is carried out successively for the P-type and N-type thermoelectric conversion materials so as to manufacture a P-type half body having the electrodes and P-type chips formed on the insulation substrate and an N-type half body having the electrodes and N-type chips formed on the other insulation substrate. The P-type half body and the N-type half body are combined together to manufacture a thermoelectric conversion module including a combination of multiple thermoelectric conversion elements. <P>COPYRIGHT: (C)2012,JPO&INPIT |
