| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for measuring a piezoelectric characteristic (d31 constant) with high accuracy. <P>SOLUTION: The method related to the present invention is a method for measuring a piezoelectric characteristic of a measuring object having a substrate and a piezoelectric element formed thereon and comprises: holding the measuring object by fixing one end thereof; putting the measuring object into vibration state by applying a voltage signal to a piezoelectric layer of the piezoelectric element; receiving reflected light from the measuring object by illuminating the measuring object in the vibration state with laser light from a light source; obtaining secular change in displacement of the measuring object from the reflected light and reference light from the light source using a laser Doppler vibrometer; and calculating the piezoelectric characteristic of the piezoelectric layer of the measuring object from the displacement. In addition, in the process of obtaining the reflected light, the laser light is oriented so as to hit a node the secondary vibration of the measuring object. <P>COPYRIGHT: (C)2012,JPO&INPIT |
