发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device and a method of fabricating a semiconductor device. The semiconductor device includes an interlayer insulation layer pattern, a metal wire pattern exposed by a passage formed by a via hole formed in the interlayer insulation layer pattern to input and output an electrical signal, and a plated layer pattern directly contacting the metal wire pattern and filling the via hole. The method includes forming an interlayer insulation layer having a metal wire pattern to input and output an electrical signal formed therein, forming a via hole to define a passage that extends through the interlayer insulation layer until at least a part of the metal wire pattern is exposed, and forming a plated layer pattern to fill the via hole and to directly contact the metal wire pattern by using the metal wire pattern exposed through the via hole as a seed metal layer.
申请公布号 US2011284936(A1) 申请公布日期 2011.11.24
申请号 US201113108231 申请日期 2011.05.16
申请人 CHOI JU-IL;PHEE JAE-HYUN;LEE HYU-HA;LEE HO-JIN;HWANG SON-KWAN;SAMSUNG ELECTRONICS CO., LTD 发明人 CHOI JU-IL;PHEE JAE-HYUN;LEE HYU-HA;LEE HO-JIN;HWANG SON-KWAN
分类号 H01L29/772;H01L23/48 主分类号 H01L29/772
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