METHOD FOR FORMING A MICRO-SURFACE STRUCTURE AND FOR PRODUCING A MICRO-ELECTROMECHANICAL COMPONENT, MICRO-SURFACE STRUCTURE AND MICRO-ELECTROMECHANICAL COMPONENT HAVING SAID MICRO-SURFACE STRUCTURE

摘要

The present invention relates to a method for forming a micro-surface structure on a substrate, in particular for producing a micro-electromechanical component, a micro-surface structure of this type, a method for producing a micro-electromechanical component having a micro-surface structure of this type and such a micro-electromechanical component. The invention is particularly relevant for components of microsystem technology (MST, micro-electromechanical systems MEMS) and the construction and connection technology for hermetically housing micro components, preferably using getter materials.