,申请号JP20080068427-传众专利搜索

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发明名称
摘要
申请公布号	JP4823260(B2)	申请公布日期	2011.11.24
申请号	JP20080068427	申请日期	2008.03.17
申请人		发明人
分类号	C23C16/12;C23C16/44;C23C16/34;C23C16/40;H01L21/205;H01L21/285;H01L21/316	主分类号	C23C16/12
代理机构		代理人
主权项
地址

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