| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a frame material which can perform stable polishing by improving the shapes of end parts of an object to be polished. <P>SOLUTION: A holder 10 includes a template 5 and a polyurethane sheet 2. In the template 5, divided frame materials 51 divided into a plurality of frame materials are connected to form an inner peripheral surface of a through-hole 6 on one side surface. Each recessed part 5a is formed at both end parts of each of the divided frame materials 51, and a recessed part 5b is formed on an inner peripheral side of each connecting part S between the divided frame materials 51. A connecting member 7a is fitted to both of recessed parts 5a of the divided frame materials 51 adjacent to each other. A soft member 7b that a projection t projects toward the inside of the template 5 is fitted to both of the recessed parts 5b of the divided frame materials 51 adjacent to each other. The plurality of divided frame materials 51 are connected by the connecting member 7a, and direct contact of the object to be polished and the divided frame materials 51 is suppressed by the projection t of the soft member 7b. <P>COPYRIGHT: (C)2012,JPO&INPIT |
