| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a micropattern, which has less mold contamination, excellent in mold releasability and substrate adhesiveness after exposure. <P>SOLUTION: In the method of manufacturing the micropattern, a polymerization initiation activity of a curable composition constituting a layer adjacent to the mold is made higher than the polymerization initiation activity of the curable composition constituting a layer closer to the substrate than the layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
