摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composition for texture formation for a silicon substrate surface capable of forming fine uneven portions with less variation to form the silicon substrate with low reflectance, and the forming method thereof. <P>SOLUTION: This is a composition for texture formation which contacts with a silicon substrate surface to form uneven portions on the surface, and by bringing the composition for texture formation consisting of water, base and an amide compound having an amide bond and the texture composition into contact with the silicon substrate surface, uneven potions are formed on the substrate surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |