发明名称 VERTICAL TRANSISTOR AND A METHOD OF FABRICATING THE SAME
摘要 A vertical transistor and a method of fabricating the vertical transistor are provided. The vertical transistor has a substrate, a first electrode formed on the substrate, a first insulation layer formed on the first electrode, with a portion of the first electrode exposed from the first insulation layer and having a thickness greater than 50 nm and no more than 300 nm, a grid electrode formed on the first insulation layer, a semiconductor layer formed on the first electrode, and a second electrode formed on the semiconductor layer.
申请公布号 US2011284949(A1) 申请公布日期 2011.11.24
申请号 US20100786343 申请日期 2010.05.24
申请人 MENG HSIN-FEI;ZAN HSIAO-WEN;CHAO YU-CHIANG;NATIONAL CHIAO TUNG UNIVERSITY 发明人 MENG HSIN-FEI;ZAN HSIAO-WEN;CHAO YU-CHIANG
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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