COMPUTATION EFFICIENCY BY ITERATIVE SPATIAL HARMONICS ORDER TRUNCATION
摘要
A method for improving computation efficiency for diffraction signals in optical metrology is described. The method includes simulating a set of spatial harmonics orders for a grating structure. The set of spatial harmonics orders is truncated to provide a first truncated set of spatial harmonics orders based on a first pattern. The first truncated set of spatial harmonics orders is modified by an iterative process to provide a second truncated set of spatial harmonics orders based on a second pattern, the second pattern different from the first pattern. Finally, a simulated spectrum is provided based on the second truncated set of spatial harmonics orders.
申请公布号
WO2011146643(A2)
申请公布日期
2011.11.24
申请号
WO2011US37030
申请日期
2011.05.18
申请人
TOKYO ELECTRON LIMITED;KLA-TENCOR CORPORATION;VELDMAN, ANDREI;HENCH, JOHN, J.