SUPPORTING DEVICE, SUPPORTING METHOD, TRANSFER DEVICE AND TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide a supporting device/method and a transfer device/method which can suppress the deflection of a plate-like member regardless of a supporting attitude and a transferring operation of the member.

SOLUTION: The transfer device 1 for a plate-like member W having an adhesive sheet MS attached thereon comprises: a holding means 2 for holding the plate-like member W through the adhesive sheet MS; a face position keeping means 6 for energizing the plate-like member W held by the holding means 2 and keeping the face position of the plate-like member W at a predetermined position; and a moving means 3 for moving the holding means 2. The face position keeping means 6 can keep the face position of the plate-like member W regardless of the supporting attitude and the transferring operation of the plate-like member W by energizing the plate-like member W to one side or the other side.

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