| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a system for inspecting a probe needle in a short time and with high reliability. <P>SOLUTION: The inspection system 1 is provided with a drive mechanism 29 for making the tips of a plurality of probe needles respectively contact a plurality of touch areas in a common conductive part, a measurement part 32A which constructs a plurality of pairs of probe needles from among the plurality of probe needles 22 and measures electrical characteristics by applying a potential difference across probe needles which forms a pair, and a probe inspection part 32B which determines the quality of each probe needle on the basis of the measured electrical characteristics. <P>COPYRIGHT: (C)2012,JPO&INPIT |
