发明名称 |
MECHANICAL ISOLATION FOR MEMS ELECTRICAL CONTACTS |
摘要 |
In accordance with the disclosure, a MEMS substrate is provided that includes: a central planar portion configured to support a MEMS device; and a first electrical pad coplanar with the central planar portion, the first pad being connected to the central planar portion through a first flexure, wherein the first flexure is configured to substantially mechanically isolate the first electrical pad from the central planar portion. |
申请公布号 |
WO2010138931(A3) |
申请公布日期 |
2011.11.24 |
申请号 |
WO2010US36749 |
申请日期 |
2010.05.28 |
申请人 |
TESSERA MEMS TECHNOLOGIES, INC.;GUTIERREZ, ROMAN C.;CALVET, ROBERT J |
发明人 |
GUTIERREZ, ROMAN C.;CALVET, ROBERT J |
分类号 |
B81B7/00 |
主分类号 |
B81B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|