发明名称 METHOD FOR MAKING A SEMICONDUCTOR STRUCTURE WITH A BURIED GROUND PLANE
摘要 A method for making a semiconducting structure, including: a) forming, on a surface of a final semiconductor substrate, a semiconducting layer, doped with elements from columns III and V of the Periodic Table so as to form a ground plane, b) forming a dielectric layer, c) then assembling, by direct adhesion of the source substrate, on the final substrate, the layer forming the ground plane between the final substrate and the source substrate, the dielectric layer being between the source substrate and the ground plane, d) then thinning the source substrate, leaving, on the surface of the semiconductor structure, a film made from a semiconducting material.
申请公布号 US2011284870(A1) 申请公布日期 2011.11.24
申请号 US200913057239 申请日期 2009.08.13
申请人 COMMISS. A L'ENERGIE ATOM. ET AUX ENERG. ALTERNA. 发明人 LE TIEC YANNICK;ANDRIEU FRANCOIS
分类号 H01L29/02;H01L21/18;H01L29/06 主分类号 H01L29/02
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