| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology capable of producing a compact sensor with high detection sensitivity. <P>SOLUTION: The present invention is embodied as a movable body formed on a substrate. The movable body comprises a first frame body, a second frame body which is placed so as to be partly or completely superimposed on the first frame body with the first and second frame bodies opposing to each other, a coupling section which is linked with the first frame body via a first spring section and with the second frame body via a second spring section, and a stationary section which is linked with the coupling section via a third spring section and fixed to the substrate. Because in the first, second, and third spring sections, a spring constant in one direction is remarkably smaller than those in other directions, a relative displacement in the only one direction is substantially allowed. The directions in which the relative displacement is allowed by the first, second, and third spring sections are perpendicular to one another. <P>COPYRIGHT: (C)2012,JPO&INPIT |
