| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a placement plate, a substrate transfer apparatus, and a substrate processing apparatus which makes sure that a substrate can be taken out of a substrate storage container. <P>SOLUTION: A tweezer 50 for putting a wafer 1 into and out of a pod comprises: base end side placement parts 52, 52 for placing the wafer 1; tip side placement parts 54, 54; tip side hook parts 55, 55 for hooking the peripheral part of the wafer 1 on the back side inside the pod when taking the wafer 1 out of the pod; and a counterbore 51 for preventing displacement of the wafer 1. The tip side hook parts 55, 55 are positioned with the tip sides forked, their included angles Θb to the placement planes of the tip side placement parts 54, 54 are right or acute, and they are positioned near positioning parts inside the pod when hooking the wafer 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
