Disclosed is a scanning electron microscope which suppresses sample drift occurring due to the operation of a drive motor for a sample stage, or the change in room temperature. The electric current supplied to the motor when a sample moves is identical to the electric current supplied to the motor when the sample stops, or the difference between the electric currents is 20% or less. Thus, the change in heat quantity of the motor is reduced, and the sample drift is reduced when the sample is observed.
