发明名称 LIQUID PRECURSOR FOR DEPOSITION OF COPPER SELENIDE AND METHOD OF PREPARING THE SAME
摘要 <p>Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.</p>
申请公布号 WO2011146115(A1) 申请公布日期 2011.11.24
申请号 WO2011US00870 申请日期 2011.05.17
申请人 HELIOVOLT CORPORATION;ALLIANCE FOR SUSTAINABLE ENERGY, LLC;CURTIS, CALVIN, J.;MIEDANER, ALEXANDER;VAN HEST, MARIUS, FRANCISCUS ANTONIUS MARIA;GINLEY, DAVID, S.;HERSH, PETER, A.;ELDADA, LOUAY;STANBERY, BILLY, J. 发明人 CURTIS, CALVIN, J.;MIEDANER, ALEXANDER;VAN HEST, MARIUS, FRANCISCUS ANTONIUS MARIA;GINLEY, DAVID, S.;HERSH, PETER, A.;ELDADA, LOUAY;STANBERY, BILLY, J.
分类号 H01L31/032;H01L31/0264 主分类号 H01L31/032
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