| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a terahertz wave detection apparatus with which terahertz wave can be accurately detected and to provide a manufacturing method of the terahertz wave detection apparatus. <P>SOLUTION: In a terahertz wave detection apparatus 1, electric current converted by an antenna main body 11 is supplied to a resistance film 13 via an antenna wiring 15. While the antenna main body 11 is formed on a substrate 3, the antenna wiring 15 is formed on a substrate 4. By this, the antenna wiring 15 can be made as thin as bolometer wiring 16 so that the heat resistance of the antenna wiring 15 can be increased. As a result, an insulation film 12, a resistance film 13 and a bolometer film 14 can be thermally separated from the antenna main body 11. <P>COPYRIGHT: (C)2012,JPO&INPIT |
