A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers (22) for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances (30) extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.
申请公布号
EP2361672(A3)
申请公布日期
2011.11.23
申请号
EP20110153870
申请日期
2003.07.01
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
GREGG, JOHN;BATTLE, SCOTT;BANTON, JEFFREY I.;NAITO, DONN;FUIERER, MARIANNE;LAXMAN, RAVI K.