发明名称 MICROSENSOR PRODUCED IN MICROSYSTEM TECHNOLOGIES FOR THE MEASUREMENT AND/OR DETECTION OF FOULING
摘要 <p>A sensor (10; 34) for measuring and/or detecting fouling that forms directly or indirectly on a so-called front surface of the sensor, includes the following in the form of a plurality of superimposed layers:—at least one heating element (14) that is able to diffuse, on command, a homogenous, monitored heat flow whose heat output is less than 200 mW,—a heat insulator (11) located on the side opposite the front surface of the sensor to prevent dissipation of the heat flow from the opposite side,—at least one temperature measuring element (16) that is placed in the homogenous heat flow diffused by the at least one heating element and that offers a precision of temperature measurement of better than 0.1° C., and—a substrate (12; 42) on which the layers of the at least one heating element and at least one temperature measuring element are connected.</p>
申请公布号 EP2387709(A1) 申请公布日期 2011.11.23
申请号 EP20100707321 申请日期 2010.01.19
申请人 NEOSENS 发明人 AURET, LAURENT;FLOURENS, FREDERIC;FILLAUDEAU, LUC
分类号 G01N17/00;G01N25/18 主分类号 G01N17/00
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