| 摘要 |
<p>The invention provides multiple detectors (334,426;340,420,502,826L,702) that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism (322,412) that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one (334,426) of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.</p> |
