发明名称 |
APPARATUS FOR UNLOADING PICKER GLASS PLATE OF WATERJET SINGULATION APPARATUS |
摘要 |
PURPOSE: An apparatus for unloading picker glass plate of water-jet singulation apparatus is provided to improve separation and the effectiveness of a transferring work by moving a glass plate to a certain place to divide the effective side and inflexible side of the glass plate. CONSTITUTION: In an apparatus for unloading picker glass plate of water-jet singulation apparatus. A first nozzle member(200) transfers vacuum generated from a vacuum generation apparatus(700) to a plurality of first nozzle holes. A second nozzle member(400) transfers the vacuum created in the vacuum generation apparatus to a plurality of second nozzles. A first switch(100) turns on/off vacuum which is transferred from the first nozzle. A second switch(300) turns on/off vacuum which is selectively transferred from the second nozzle A power supply unit(800) supplies power to the first and second switches.
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申请公布号 |
KR20110126467(A) |
申请公布日期 |
2011.11.23 |
申请号 |
KR20100046152 |
申请日期 |
2010.05.17 |
申请人 |
CAMMSYS CORP. |
发明人 |
KIM, JANG KI;LEE, DAE HYUNG |
分类号 |
H01L21/683;H01L21/301;H01L21/78 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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