METHOD FOR MEASURING DEVIATION OF MACHINE WITH 3 AXES MOVING TABLE

摘要

PURPOSE: A method of measuring the error of a machine with a three-axis transfer table is provided to accurately measure the error of a machine with a three-axis transfer table since the table moves only to a two-axis direction for any measuring space and the movement is very small. CONSTITUTION: A method of measuring the error of a machine with a three-axis transfer table is as follows. X-, Y-, and Z-axes errors of each of at least three of four diagonal vectors connecting facing vertexes of a measuring space similar to a working space are calculated. Error values are calculated using the calculated result. A method of calculating the X-, Y-, and Z-axes errors is as follows. X-, Y-, and Z-axes errors of a first one of the three diagonal vectors are calculated. X-, Y-, and Z-axes errors of a second one of the three diagonal vectors are calculated. X-, Y-, and Z-axes errors of a third one of the three diagonal vectors are calculated.