| 摘要 |
A high-performance and inexpensive thin film solid state lithium ion secondary battery that is able to be charged and discharged in the air and is able to be manufactured stably at a favorable yield, and a method of manufacturing the same are provided. The thin film solid state lithium ion secondary battery has an electric insulating substrate 10 formed from an organic resin, an inorganic insulating film provided on the substrate face, a cathode-side current collector film 30, a cathode active material film 40, a solid electrolyte film 50, an anode-side current collector protective film 68, and an anode-side current collector film 70. In the thin film solid state lithium ion secondary battery, the cathode-side current collector film and/or the anode-side current collector film is formed on the inorganic insulating film face. The anode-side current collector protective film is formed from a conductive oxide including at least any one of an oxide of Sn, In, and Zn, and holds the total amount of lithium associated with charge and discharge roughly constant. The thickness of the anode-side current collector protective film is 2 nm or more and 22 nm or less. The thickness of the inorganic insulating film is 5 nm or more and 500 nm or less. The inorganic insulating film contains at least any one of an oxide, a nitride, and a sulfide containing one of Si, Al, Cr, Zr, Ta, Ti, Mn, Mg, and Zn. |
