| 摘要 |
<p>A sample holder (40) is offered which permits a liquid sample (20) to be observed or inspected well. Also, an inspection apparatus (29) and an inspection method using the sample holder (40) are offered. The sample holder (40) has a film (32) including a first surface (32a) and a second surface (32b). The liquid sample (20) is held on the first surface (32a). The film (32) is made of two or more layers. A space inside the apparatus which is in contact with the second surface (32b) is placed in a reduced-pressure ambient. A primary beam (7) (such as an electron beam) irradiation device (2) is installed in the reduced-pressure space. A primary beam (7) produced from the primary beam irradiation device (2) is directed at the liquid sample (20) via the film (32). Consequently, the sample (20) can be observed or inspected while maintaining the sample at the atmospheric pressure. During observation or inspection, if the film (20) is damaged, the space in the apparatus (29) is restored to atmospheric pressure at the time when breakage of one of the layers of the film (32) is detected. Thus, contamination of the inside of the apparatus can be prevented.</p> |
