发明名称 METHOD FOR FABRICATING A SEMICONDUCTOR COMPONENT HAVING REGIONS WITH DIFFERENT LEVELS OF DOPING
摘要 <p>The method involves forming a layer (58), which inhibits diffusion of a dopant. The dopant is penetrated into the layer on a portion of the surface of a semiconductor component material (50). A diffusion-inhibiting layer in a highly doped region (62) is partially removed. The dopant source (66) is formed on the diffusion-inhibiting layer in the highly doped region and the dopant is diffused from the dopant source into the semiconductor component material. The dopant is made up of phosphorus or boron.</p>
申请公布号 EP1977442(B1) 申请公布日期 2011.11.23
申请号 EP20070702893 申请日期 2007.01.19
申请人 GP SOLAR GMBH 发明人 FATH, PETER;MELNYK, IHOR
分类号 H01L21/225;H01L27/142;H01L31/0224;H01L31/068 主分类号 H01L21/225
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