HIGH EFFICIENCY SOLID-STATE LIGHT SOURCE AND METHODS OF USE AND MANUFACTURE
摘要
The invention relates to a semiconductor materials inspection system having a substrate which is thermally coupled to a heat sink. Drive circuitry is provided to supply power to an array of solid-state light emitting devices which are disposed on the surface of the substrate. The system produces a light output power density of at least about 50mW/cm 2 wherein the solid-state light emitting devices are capable of emitting light in the infrared region between about 1050nm and about 2.5 um.
申请公布号
EP1508157(B1)
申请公布日期
2011.11.23
申请号
EP20030724539
申请日期
2003.05.08
申请人
PHOSEON TECHNOLOGY, INC.;OWEN, MARK D.;MCNEIL, TOM;VLACH, FRANCOIS