发明名称 |
Electrostatic chuck electrical balancing circuit repair |
摘要 |
The present invention includes methods and apparatus for repairing an electrical connection between bipolar electrodes contained within an electrostatic chuck and a conductive mask disposed atop the electrostatic chuck, known as a balancing circuit. Embodiments of the invention are particularly useful after removal of an electrostatic chuck for refurbishment. |
申请公布号 |
US8064185(B2) |
申请公布日期 |
2011.11.22 |
申请号 |
US20080205428 |
申请日期 |
2008.09.05 |
申请人 |
HIRAHARA ROBERT T.;PARKHE VIJAY D.;APPLIED MATERIALS, INC. |
发明人 |
HIRAHARA ROBERT T.;PARKHE VIJAY D. |
分类号 |
H01L21/683;H01T23/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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